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有机硅化学品

四乙氧基硅烷(电子级)
序号 Km-929
产品名称 四乙氧基硅烷(电子级)
CAS号 78-10-4
详细介绍

Product name: Tetraethoxysilane (electronic grade)

Synonyms: Ethyl silicate; Tetraethyl Orthosilicate

CAS NO: 78-10-4

EINECS: 201-083-8

Molecular formula: C4H12O4Si

 

Specification:

 

Items

Technical index

Appearance

Colorless transparent liquid

Assay

99.9% Min.

Total cation

1ppm Max.

Total Cl-

0.5ppm Max.

Density(g/cm3,20’C)

0.915-0.945

Refractive index(25℃)

1.3750-1.3900

 

Application:

It’s mainly used for CVD manufacturing in the wafer manufacturing process. Used for producing silicon dioxide thin films, it is a semiconductor Discrete components, electronic chemicals required for the manufacturing of microelectromechanical systems.

It’s used as chlorine free or ultra-low chlorine insulation and heat-resistant materials.

It’s used for manufacturing high-quality grinding particles in the semiconductor industry.  



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