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Tetramethylsilane(4MS) |
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| Index No.: | Km-914 | ||||||||||
| Products Name | Tetramethylsilane(4MS) | ||||||||||
| CAS No.: | 75-76-3 | ||||||||||
Introduction |
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English name: Tetramethylsilane(4MS) Other names: Tetramethylsilane(TMS) M.F.: C4H12Si M.W. 88.22 EINECS: 200-899-1
Tetramethylsilane is a low-boiling liquid, that is insoluble in water and cold concentrated sulfuric acid, but soluble in most organic solvents such as ether. It’s used as a reagent, solvent, nuclear magnetic resonance reagent, as well as silanes for chemical vapor deposition(CVD) and spin-on dielectrics(SOD).
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