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Tetramethoxysilane (electronic grade)
Index No.: Km-928
Products Name Tetramethoxysilane (electronic grade)
CAS No.: 681-84-5
Introduction

Product name: Tetramethoxysilane (electronic grade)

Synonyms: Methyl orthosilicate ; Methyl silicate; Tetramethyl orthosilicate

CAS NO: 681-84-5

EINECS: 211-656-4

Molecular formula: C4H12O4Si

 

Specification:

 

Items

Technical index

Appearance

Colorless transparent liquid

Assay

99.5% Min.

Total cation

1ppm Max.

Total Cl-

0.5ppm Max.

Density(g/cm3,20’C)

1.0180-1.0380

Refractive index(25℃)

1.3600-1.3700

 

Application:

 

It can be used as an intermediate for sol gel reflection.

It can be used as chlorine free or ultra-low chlorine insulation and heat-resistant materials.

It can be used for manufacturing high-quality grinding particles in the semiconductor industry. 

Tetramethoxysilane has a higher silicon dioxide content and cost-effectiveness than tetraethoxysilane, making it suitable for preparing semiconductor CVD processes.



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